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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01146360(A)
申请公布日期
1989.06.08
申请号
JP19870304487
申请日期
1987.12.03
申请人
HITACHI LTD
发明人
USAGAWA TOSHIYUKI;GOSHIMA SHIGEO;KAWADA MASAHIKO;HIRUMA TAKEYUKI;MISHIMA TOMOYOSHI
分类号
H01L21/205;H01L21/331;H01L21/338;H01L29/205;H01L29/72;H01L29/73;H01L29/737;H01L29/778;H01L29/80;H01L29/812;(IPC1-7):H01L29/72
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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