PROCESS FOR MANUFACTURING THICH FILM ELECTRICAL COMPONENTS

摘要

A thick film electrical component is prepd. by forming a paste on a ceramic substrate by screen-printing, drying and firing at sublimating temperature to form the electric component. The firing step is performed at 300-1000oC in N2 contg. 10-10000ppm N2O. A preheat zone is pref. held at 22-850oC and contains 10-10000ppm N2 while hot zone at 300-1000oC contains 3000ppm max. N2O. Soot deposition resulting from vapourisation of the paste vehicle is minimised.