| 摘要 |
PURPOSE:To suppress curved slicing and to obtain a straight cut surface by directly measuring the shape of the cut surface of an ingot in a cutting feed direction and correcting the indexing position of the ingot at every cutting feed position on the basis of the measured result. CONSTITUTION:The shape of the cut surface C1 of an ingot of the first time is measured by a shape measuring apparatus consisting of the first - third measuring heads 27 - 29 and a shape measuring apparatus main body 30 and a blade 2 is sent for the purpose of cutting by a cutting feed motor 10 to return the blade 2 and the ingot W to their original positions and the first cut wafer W1 is taken to complete the cutting of the second time. A control signal is outputted from an indexing feed correction control apparatus 31 on the basis of the shape signal at the time of cutting and the cutting feed position signal from a cutting feed motor control apparatus 11 and the indexing position of the ingot W is controlled so that each of cut surfaces C2, C3... coincides with a reference surface C0. |
