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发明名称
DRYING DEVICE OF SEMICONDUCTOR WAFER
摘要
申请公布号
JPH02281626(A)
申请公布日期
1990.11.19
申请号
JP19890102827
申请日期
1989.04.22
申请人
MITSUBISHI ELECTRIC CORP
发明人
HORI KOICHIRO
分类号
H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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