| 摘要 |
A purge module is provided which provides gas to an enclosure at a first flow rate in order to purge the enclosure of harmful gases. After the pressure within the enclosure has reached a predetermined level, a sensor enables gas at a low pressure to be supplied to the enclosure after a predetermined time has passed. The purge module also enables power to be supplied to the device being purged at the same time the purge gas flow rate is changed.
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