发明名称 THIN FILM SUPERCONDUCTOR AND ITS PRODUCTION
摘要 PURPOSE:To increase the superconducting transition temp. of a thin film superconductor by alternately laminating a thin Bi-type superconducting film and a thin Bi-W-type oxide film periodically. CONSTITUTION:A thin superconducting film of lamellar oxide, such as Bi-Sr-Ca- Cu-O, having a composition containing, as principal components, Bi-containing oxide, Cu, and alkaline earth elements (group IIa) and a thin film of lamellar oxide, such as Bi-W-O, having a composition containing, as principal components, at least Bi and W are laminated on a base material alternately and periodically. At this time lamination is carried out by means of vapor deposition, etc. By this method, a laminated film of the thin Bi-type superconducting film and the insulating film can be obtained with superior reproducibility, and the superconducting transition temp. inherent in the thin Bi-type superconducting film can be increased.
申请公布号 JPH0382749(A) 申请公布日期 1991.04.08
申请号 JP19890220743 申请日期 1989.08.28
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 MATSUSHIMA CHOMEI;ICHIKAWA HIROSHI;ADACHI HIDEAKI;NISHIKURA KUMIKO;WASA KIYOTAKA
分类号 C23C14/08;C01G1/00;C01G29/00;C23C28/04;H01B12/00;H01B12/06;H01B13/00;H01L39/02;H01L39/24 主分类号 C23C14/08
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