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发明名称
ION SOURCE
摘要
申请公布号
JPH03257747(A)
申请公布日期
1991.11.18
申请号
JP19900053678
申请日期
1990.03.07
申请人
HITACHI LTD
发明人
MATSUO HISAHIDE;SAKUMICHI KUNIYUKI;TOKIKUCHI KATSUMI;SEKI TAKAYOSHI;IGA TAKASHI
分类号
H01J27/14;H01J37/08
主分类号
H01J27/14
代理机构
代理人
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地址
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