发明名称 ILLUMINATION OPTICAL SYSTEM
摘要 An illumination optical system including a plurality of separate laser sources or a plurality of separate secondary light sources defined by the laser beams emerging from the laser sources. On an area to be illuminated, the laser beams emerging from the laser sources or emerging from the secondary light sources are superposed upon one another, whereby uniform exposure and an improved imaging performance are assured.
申请公布号 US5091744(A) 申请公布日期 1992.02.25
申请号 US19910715743 申请日期 1991.06.18
申请人 CANON KABUSHIKI KAISHA 发明人 OMATA, TAKASHI
分类号 G03F7/20;H01L21/68 主分类号 G03F7/20
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