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发明名称
摘要
申请公布号
JPH0494514(U)
申请公布日期
1992.08.17
申请号
JP19900405240U
申请日期
1990.12.28
申请人
发明人
分类号
G01B7/00;G01D5/245;G01R33/00;H01L43/08;(IPC1-7):G01D5/245
主分类号
G01B7/00
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