| 摘要 |
PURPOSE:To enhance an SiC capillary in bonding strength and thermal conductivity between the SiC capillary and an AlN outer easing by a method wherein the SiC capillary and the AlN outer easing are fixed by brazing with active metal. CONSTITUTION:A cylindrical capillary part 1 provided with a center capillary hole 2 and a collar 3 is formed of material such as SiC or the like excellent in sputtering characteristics to plasma, enveloped in a cylindrical AlN outer casing 4 with gas return holes provided to be enhanced in thermal conductivity, and fixed to the easing 4 by bonding with brazing material 6 of titanium-copper- silver. In this case, bonding strength of brazing material is as high as 20kg/mm<2>, about 4 times that of low-melting glassing sealing. By this setup, an ion laser tube of this design can be kept unchanged in bonding strength to heat cycles while a laser tube is in operation, the heat released from an SiC capillary part can be efficiently discharged, and the SiC capillary part can be lessened in influence of ion sputtering. |
