DYNAMIC CREATION OF BACKUP FIDUCIALS

摘要

Multiple reference fiducials are formed on a sample on a sample for charged particle beam facilities processing of the sample. As one fiducial is degraded by the charged particle beam, a second fiducial is used to create one or more additional fiducials.

主权项

1. A method of aligning a charged particle beam for processing, comprising:
creating at least one primary fiducial at a location proximal to a region of interest, the at least one primary fiducial being identifiable by image recognition; creating at least one first backup fiducial; processing the region of interest with the charged particle beam using the at least one primary fiducial to position the beam relative to the region of interest; and continuing processing the region of interest using the at least one backup fiducial to track the location of the region of interest.