摘要 |
<p>PURPOSE:To obtain a voltage detector with a higher voltage detection sensitivity by measuring a measuring distance between the object to be measured and a light probe precisely to control in a voltage detector which measures the voltage of the object to be measured in a noncontact manner. CONSTITUTION:Parts of three light beams P emitted from a second light source 56 are reflected by a reflection means 40c to make the first reflected light P1 and the rest thereof is reflected on the surface of an object 42 to be measured separately to make the second reflected lights P2. Three interference light beams are generated by the two reflected lights. Then intensity of each interference light is detected by an interference light detection means 60. A measuring distance control means 67 and an inclination drive section 69 measure a measuring distance (d) between a light probe 40 and the object 42 to be measured and the inclination of the object 42 to be measured based on a detection signal to control.</p> |