| 摘要 |
PURPOSE:To observe a specimen surface clearly at a visible region for confirming a measurement position regardless of chromatic aberration of a hemisphere prism using light with a single wavelength or a narrow-band wavelength inside the visible region as illumination light for observation. CONSTITUTION:A hemisphere prism 1 consisting of a transparent and high refractive index material at both visible and infrared regions is used, a specimen S is laid out skewly for a light axis a of a microscope optical system, and the prism 1 is pressed against the surface of the specimen S. Then, light from the specimen S through the prism 1 forms an image at the position of a mask 3, its measurement position is limited by the mask 3, the light is divided into two light paths by a half mirror 4, the observation light at the visible region is enlarged by an eye mirror 6 and the measurement position of the specimen S can be observed. Also, the measurement light at the infrared region is subjected to photoelectric conversion by a photo detector 5 and then is subjected to spectral analysis. Then, the wavelength of visible light used for observation is limited to a single wavelength or a narrow wavelength region, thus observing the specimen surface clearly since the observed image does not have any chromatic aberration. |
