| 摘要 |
PURPOSE:To obtain an aluminum nitride component in which aluminum nitride rigidly adheres to a metallized layer by coating an aluminum nitride member with metallized paste and then baking it in a predetermined atmosphere. CONSTITUTION:An aluminum nitride baked substrate 1 is coated with Mo-Mn series metallized paste 2. Then, the substrate 1 coated with the paste is introduced into a baking furnace, and baked at 1250-1450 deg.C in a reducing atmosphere, thereby forming a metallized layer 2. An alumina Al2O3 layer 3 having 0.2-20mum of thickness is formed on the whole surface of the substrate 1 in this baking step. Then, after a nickel plating layer 4 is formed on the whole surface of the layer 2, leads 6 are brazed with a silver brazing material 5. |
