DRIVING APPARATUS AND DEVICE FABRICATION METHOD

摘要

A driving apparatus comprises a stator (21), a rotor (22) and a deformation connector (23). The rotor is connected to the stator through the deformation connector. An external driving force drives the deformation connector to have deformation so that the rotor changes its position with respect to the stator. Under the condition that no external driving force is applied, the deformation connector remains at a force balanced position (x0). The force on the deformation connector comprises a deformation force (F1) of the deformation connector and a first primitive force (F2) in opposite direction to the deformation force (F1). Also provided is a device fabrication method. Because the deformation connector keeps balance under the effect of the deformation force and the first primitive force, a small external driving force is required when the driving apparatus operates near the balance point, hereby reducing power consumption.

主权项

1. A driving device, comprising a statorr, a mover and a deformable connection member, wherein the mover is connected with the stator through the deformable connection member and an exogenous driving force drives the mover or the deformable connection member to deform such that a position of the mover with respect to the stator is changed, and wherein:
when the exogenous driving force has not been applied, the deformable connection member is kept at a force balance position (x0), and forces acting on the deformable connection member comprise a deformation force (F1) of the deformable connection member and a first native force (F2) which is opposite to the deformation force in direction.