| 摘要 |
<p>PURPOSE:To acquire a vacuum driving device which can realize large stroke without detrimental effect of generating dust. CONSTITUTION:A vacuum driving device 1 is provided in a vacuum chamber 2 and has a Z-stage 11. A Z-stage moving device 15 which moves the Z-stage 11 is provided with a wedge stage 16 provided to a lower side of the Z-stage 11 and a wedge stage moving device 21 which is composed of a nut member 22 attached to the wedge stage 16, a ball screw 23 which is screwed to the nut member 22 and a driving device 24 which moves the Z-stage 11 up and down by moving the wedge stage 16 horizontally by driving the ball screw 23. Therefore, the driving device 24 is constituted of a non-magnetic ultrasonic motor 32 whose outer circumference is covered with a cover container 30 and output shaft 32A is projected through a lip seal 31.</p> |
