发明名称 METHOD OF FABRICATION OF SOLAR CELL ABSORPTION LAYER
摘要 PURPOSE:To provide an improved method wherein a solar cell absorption layer of copper-indium-selenium tertiary alloy with the atomic ratio controlled within a desired narrow region can be stably fabricated. CONSTITUTION:An inhomogeneous thin film that contains copper and indium at a molar ratio of about 1:1 and contains selenium at a molar ratio of 2 or less with respect to copper or indium is formed on a conductive substrate. Theta, the thin film is heat-treated in an atmosphere containing selenium vapor and is hereby converted to a tertiary alloy layer of a molar ratio of copper: indium:selenium of about 1:1:2. Hereby, a solar cell absorption layer is fabricated, which is high in crystallinity, dense, and is reduced in any defect.
申请公布号 JPH0794765(A) 申请公布日期 1995.04.07
申请号 JP19930233406 申请日期 1993.09.20
申请人 YAZAKI CORP 发明人 HIRANO TOMIO
分类号 H01L31/04 主分类号 H01L31/04
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