发明名称 DEFLECTION DETECTOR
摘要 PURPOSE:To provide a deflection detector for detecting only the deflection of a device body without transferring vibration which is not caused by the deflection from the body to a sensor. CONSTITUTION:The deflection detector is provided with a body 1, a deflection detection sensor 4 for detecting rotary motion around a rotary detection shaft A, a substrate 3 where the sensor 4 is provided, and connection parts 5a, 5b, 7a, and 7b which are provided at one part inside the body 1 and surfaces for connecting the substrate 3 to the body 1 and the central position on the connection surface at the connection part is a position for connecting the body 1 and the substrate 3 and is laid out along the cross line between the surface which is vertical to the rotary detection shaft A and contains a vertical line to the substrate 3 and the substrate 3.
申请公布号 JPH07260495(A) 申请公布日期 1995.10.13
申请号 JP19950005385 申请日期 1995.01.18
申请人 NIKON CORP 发明人 KITAGAWA YOSHITOSHI;IMURA YOSHIO
分类号 G01P9/04;G01C19/56;G01H17/00 主分类号 G01P9/04
代理机构 代理人
主权项
地址