| 摘要 |
PURPOSE:To keep the humidity of a specimen chamber at a desiring value stably at high precision by a temperature and humidity controlling apparatus using a shunting humidity generating apparatus. CONSTITUTION:A temperature and humidity controlling apparatus for an x-ray apparatus has a specimen chamber 7 to store a spacimen 4 air--tightly, a humidity generating apparatus 22 to generate a humidity-having gas to be sent to the specimen chamber 7, and a gas transporting pipe 23 to communicate the humidity generating apparatus 22 and the specimen chamber 7. The humidity generating apparatus 22 is a shunting way humidity generating apparatus in which a dry gas and a humidity saturated gas are mixed by a mixer 27 to adjust the degree of the humidity of the humidity-having gas. Heater wires 41, 16 are so controlled as to keep the temperature of the inside of the humidity generating apparatus 22 and the temperature of the inside of the specimen chamber 7 be the same mutually. Humidity alteration due to the temperature alteration is prevented in the inside of the specimen chamber 7 and the humidity is controlled stably at high precision. |
