,申请号JP19860142527-传众专利搜索

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发明名称
摘要
申请公布号	JPH07105326(B2)	申请公布日期	1995.11.13
申请号	JP19860142527	申请日期	1986.06.18
申请人		发明人
分类号	G01B11/00;G01R31/302;H01L21/027;H01L21/30;H01L21/66;(IPC1-7):H01L21/027	主分类号	G01B11/00
代理机构		代理人
主权项
地址

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