| 摘要 |
PROBLEM TO BE SOLVED: To provide an ICP emission spectrophotometer capable of reliably removing a thin film (organic thin film) attached to an incidence window in an apparatus and an optical component with a simple configuration.SOLUTION: An ICP emission spectrophotometer 1 is substantially composed of an inductively coupled plasma apparatus 10, a spectrometer 20, and a gas supply device 30. The spectrometer 20 includes an incidence window 21, an optical component 22, a vacuum pump 23, a detector 24, and an ultraviolet lamp 25. The gas supply device 30 comprises: a gas generator 31 generating an oxygen-containing gas or an ozone-containing gas and the like; a gas flow control part 32 controlling an inflow amount of a gas generated by the gas generator 31 into the spectrometer 20; and a gas introduction pipe 33 supplying the gas into the spectrometer 20. The oxygen-containing gas or the ozone-containing gas supplied reacts with ultraviolet excited and generated by an inductively coupled plasma 18, and removes an organic thin film attached to the incidence window 21 and to the optical component 22. |
