| 摘要 |
<p>PURPOSE: To prepare clean air sufficiently low in the concn. of ionic gas contaminating the surface of a base material and a substrate and a gaseous contaminant increasing a contact angle. CONSTITUTION: In the preparation of clean air 7 for preventing the surface contamination of a base material or a substrate, air 2 to be brought into contact with the base material or the substrate is passed through an ionic gas component removing process 3 using at least an ion exchange fiber and subsequently passed through a nonmethane hydrocarbon removing processes 51, 52 using at least one kind of an adsorbent selected from a silica gel, zeolite, a molecular sieve, alumina, diatomaceous earth, activated carbon, a glass material and a fluorine compd. and increasing a contact angle. In the ionic gas component removing process, the concn. of ionic gas is pref. set to 5ppb or less.</p> |
