| 摘要 |
<p>PURPOSE: To provide a work fixing device with which the flatness surface of a treated thin plate can be supported without impairing flatness and the treatment accuracy for the work to be treated can be improved. CONSTITUTION: The lower surface of a mask blanks 16 is supported by an elastic supporting points 20,..., and the end part of the mask blanks 16 is supported by elastic supporting members 24... of low rigidity in the direction of gravity and by high rigidity in the direction of the horizontal surface.</p> |
