<p>A new method and an apparatus for measuring the deflection of or the force exerted upon a cantilever-type micromechanical element is presented which is based on detecting radiation emitted from the gap between the cantilever (220) and a second surface (230, 231). The radiation, while occurring spontaneously at high frequencies when appropriately biasing the cantilever and the second surface by a voltage, can be enlarged by using external energy sources. The new method and apparatus are also applied to surface investigation, particularly to dopant profiling.</p>
申请公布号
WO9624819(A1)
申请公布日期
1996.08.15
申请号
WO1995EP00431
申请日期
1995.02.07
申请人
INTERNATIONAL BUSINESS MACHINES CORP.;BOURGOIN, JEAN-PHILIPPE, MARIE;JOHNSON, MATTHEW, BRUCE;MICHEL, BRUNO
发明人
BOURGOIN, JEAN-PHILIPPE, MARIE;JOHNSON, MATTHEW, BRUCE;MICHEL, BRUNO