| 摘要 |
PURPOSE: To easily and safely produce members for microwave and milliwave devices having high reliability by forming specific oxide high-temp. superconductor thin films by a laser vapor deposition method on both surfaces of a substrate consisting of MgO, etc., within a vacuum vessel. CONSTITUTION: The MgO single crystal substrate 208 is supported by a holder 210 longitudinally in the vacuum chamber 202 and both surfaces thereof are heated to, for example, 650 to 700 deg.C by heaters 216. Next, a laser beam 230 from a laser oscillator 222 is introduced via respective condenser lenses 229a, 229b of a half mirror 224 and a mirror 228 from incident windows 220a, 220b into the vacuum chamber 202, Two pieces of targets 212a, 212b which are rotationally moved by motors 236a, 236b and are composed of YBa2 Cu3 O7-x are irradiated with the laser beams 232a, 232b in the positions deviating from the central axes of rotation thereof, by which both targets are heated to evaporate. The thin films consisting of the YBa2 Cu3 O7-x as the oxide high-temp. superconductor are deposited on both surfaces of the substrate 208 while periodic vibration is applied thereto by a motor 256. |
