| 摘要 |
<p>PURPOSE: To secure a filtration area in a channel, to stabilize impurity separating performance during use, to replace a filter without waiting, and to reuse a used filter. CONSTITUTION: A belt shaped chemical filter 5 in which ion exchange fibers are an indispensable component is stretched zigzag in a gas channel 1 using rotary rolls 2, 3 to shut off an upstream side from a downstream side. A filter supply means 8 is installed on one side of a filter, and a chemical filter receiving means 9 is installed on the other side to set receivably. Gas to be treated is passed through the filter to catch impurities, and a used filter is received intermittently or continuously to be replaced with a new filter. Impurities can be removed continuously for a long period of time while a filter being replaced. A used filter can also be regenerated. It is suitable for the formation of a highly purified space such as a clean room.</p> |
