| 摘要 |
PROBLEM TO BE SOLVED: To provide a high efficiecy linear ultrasonic motor with less mechanical loss by configuring a linear motor in standing wave mode. SOLUTION: A linear ultrasonic motor has a pair of diaphragms 7 and 8 with protruding parts 5 and 6 for pinching a guide shaft from sides, piezoelectric elements 9 and 10 which are provided on a reverse side opposite to a surface where the protruding parts 5 and 6 are provided and which are polarized in opposite directions between left and right while pinching the protruding parts 5 and 6, a connection plate 16 for connecting a pair of diaphragms 7 and 8, and a monopoler piezoelectric element 17 which is provided on one main surface of the connection plate 16. |
