发明名称 MARKING DEVICE
摘要 PROBLEM TO BE SOLVED: To obtain a marking device having the generality corresponding to the kind of electron article by providing a jig of freely changing or exchanging with matching to the electron device being as the marking object. SOLUTION: A work inside a magazine on a loader 35 is picked up with a vacuum sucking mechanism, and it is transferred onto a transfer jig 5 of a transfer robot 4. When working of the work being mounted on the transfer jig 5 from the loader part 35 is finished, the jig 5 is moved to an unloader part 36 direction with the transfer robot 4. At the same time with this, the transfer jig lying on the transfer robot 3 in the unloader 36 side is started to move to the loader part 35. The work on the transfer jig 5 is passed through the irradiation position of laser under the optical laser system during moving, and in this time, the required mark is formed with the laser beam.
申请公布号 JPH0985471(A) 申请公布日期 1997.03.31
申请号 JP19950249083 申请日期 1995.09.27
申请人 HITACHI LTD;HITACHI TOBU SEMICONDUCTOR LTD 发明人 OTANI JUNICHI
分类号 B23K26/00;H01L23/00 主分类号 B23K26/00
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