| 摘要 |
<p>PROBLEM TO BE SOLVED: To efficiently measure the concentration of trace elements in a sample suppressing so-called knock on effect and without requiring so much labor and time even when the sample is made of a material with a high insulating property and makes measuring elements hard to ionize. SOLUTION: In this secondary ion mass spectrometry, when determining the content concentration of specified elements contained in a sample 5 to be analyzed, the surface of the sample 5 to be analyzed is irradiated with a primary ion B1 to perform a quantitative analysis of the secondary ions B2 released from the sample 5 to be analyzed according to a mass. The primary ion B1 herein used is potassium ion. Preferably, the main component material of the sample 5 to be analyzed is zinc selenide and the above-mentioned specified element is nitrogen (N). Another main component material of the sample to be analyzed is silicon(Si) and the specified element is arsenic (As).</p> |
