| 摘要 |
PROBLEM TO BE SOLVED: To manage the laser processing by detecting its condition directly in line, at real time via surface temperature measurement of the processing object, at which the laser beam is irradiated. SOLUTION: A processing resin film 10 is supplied on rolled condition and moves in a direction of an arrow. On the surface of the resin film 10, a fine laser spot is formed by the laser beam L emitted from the light source and gathered through an objective lens 4. A line management device 5 detects the temperature of the point where the laser beam irradiated by an infrared camera. Since the processing to the film is conducted by a dissolution of the film caused by the laser beam radiation, the temperature varies according to the density of the laser beam at a point where the laser beam irradiates. The laser processing condition can thereby be evaluated by detecting the temperature of the processing point of the object, not by the measurement of the beam density. |
