发明名称 FIELD EMISSION ELEMENT
摘要 <p>PROBLEM TO BE SOLVED: To provide a field emission element to prevent the increase in the number of processes and the complicated process by exposing terminals of a cathode electrode and a gate electrode on the same plane. SOLUTION: A cathode electrode not shown in the figure and a gate terminal 7 to expose the terminal of a gate electrode 4 are formed on a cathode substrate 1, and a through hole 9 is provided in an insulation layer 8. In such a multi- layered wiring structure, the line of the gate electrode 4 on the insulation layer 8 is connected to the gate terminal 7 on the cathode substrate 1 in the through hole 9. Because the insulation layer 8 is immediately below a seal 6, the seal 6 is not brought into contact with the gate electrode 4 or the gate terminal 7, and a seal protective layer can be reduced in volume. A resistance layer 3 formed below a cone electrode 5 can be provided between the gate electrode 4 and the gate terminal 7 in the through hole 9.</p>
申请公布号 JPH10308162(A) 申请公布日期 1998.11.17
申请号 JP19970116965 申请日期 1997.05.07
申请人 FUTABA CORP 发明人 KISHINO TAKAO;TSUBURAYA KAZUHIKO;OCHIAI HISATAKA;NIIYAMA TAKEHIRO;TOMITA MASAHARU
分类号 H01J1/304;H01J3/02;H01J29/90;(IPC1-7):H01J1/30 主分类号 H01J1/304
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