MACHINE-ELECTRICITY CONVERSION ELEMENT AND ITS MANUFACTURE AND ACCELERATION SENSOR

摘要

PROBLEM TO BE SOLVED: To obtain stable vibration output without any attenuation of vibration of a machine- electricity vibrator and with a high sensitivity with less fluctuation of a resonance frequency by setting a machine-electricity conversion element as a piezoelectric vibrator where a piezoelectric body layer and a metal layer are laminated in one piece relating to a monomorph-type vibration and directly forming a metal support in one piece at one protion of a metal layer for supporting the piezoelectric vibrator. SOLUTION: A support 3 that is formed in one piece while a piezoelectric body layer 2 whose outer shape is in a rectangular shape touches a metal layer 6 in terms of surface is formed at either edge part of a piezoelectric vibrator 5 and in one piece with the metal layer 6. With the support 3 as a support part, the piezoelectric vibrator 5 can be vibrated in the normal direction of the area region and is utilized as a machine-electricity conversion element 1 in a cantilever type. The support 3 may be formed at a central part in the longer direction of the vibrator 5. The conversion element where the support 3 is formed at the center of the piezoelectric vibrator 5 can gain the amount of generated electric charge as compared with a case where a resonance frequency being equal to that of the machine- electricity conversion element in an edge support structure is provided, thus obtaining a high-sensitivity machine-electricity conversion element.