发明名称 PROCESS FOR FABRICATING AN INTEGRATED CIRCUIT WITH A SELF-ALIGNED CONTACT
摘要 <p>A method of forming a contact in a flash memory device utilizes a local interconnect process technique. The local interconnect process technique allows the contact to butt against or overlap a stacked gate associated with the memory cell. The contact can include tungsten. The stacked gate is covered by a barrier layer which also covers the insulative spacers.</p>
申请公布号 WO1999049508(A1) 申请公布日期 1999.09.30
申请号 US1998026991 申请日期 1998.12.17
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