发明名称 METHOD AND DEVICE FOR TREATMENT OF SURFACES BY ARC DISCHARGE IN VACUUM
摘要 FIELD: cleaning and treatment of parts in vacuum at different stages of technological process. SUBSTANCE: method includes excitation of arc, treatment of surface by cathode spots of arc and motion of them along section of treatment; article of intricate shape is introduced into zone of treatment and removed from this zone by means of motion mechanism; then magnetic field of various configuration is formed above surface being treated; this field acts on arc discharge and negative electrode is moved over surface being treated and positive electrode is moved above surface being treated; points of connection of negative potential to surface being treated are changed; motion of cathode area of arc is effected through change of electric and magnetic fields in time and space, as well as by motion of electrodes relative to article being treated. Device used for realization of proposed method includes statement, mechanism for introducing motion from atmosphere to vacuum, box for treatment of article of intricate shape, electric arc supply source, electromagnetic coil supply source, changeable electromagnetic coils, changeable electrodes, positive electrode unit, manipulator and computer. EFFECT: improved quality and increased productivity. 3 cl, 3 dwg
申请公布号 RU2145643(C1) 申请公布日期 2000.02.20
申请号 RU19980112854 申请日期 1998.07.06
申请人 SIDOROV IGOR' PETROVICH;ANTIPOV BORIS FEDOROVICH;SENOKOSOV EVGENIJ STEPANOVICH;SENOKOSOV ANDREJ EVGEN'EVICH;DIKAREV VIKTOR IVANOVICH 发明人 SIDOROV I.P.;ANTIPOV B.F.;SENOKOSOV E.S.;SENOKOSOV A.E.;DIKAREV V.I.
分类号 C23C14/02;C23F4/04;(IPC1-7):C23C14/02 主分类号 C23C14/02
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