发明名称 |
CHEMICAL BATH FOR FABRICATING SEMICONDUCTOR DEVICE |
摘要 |
PURPOSE: A chemical bath for fabricating a semiconductor device is provided to check the capacity of a chemical in the chemical bath. CONSTITUTION: A chemical bath(20) comprises a check part(22) displayed in liter unit on an inner side or on an outer side of the chemical bath in order to check the capacity of a chemical, or a check part of liter unit capable of displaying equally per unit volume. The chemical can mix accurately without an additional tool when using a mixed chemical in a unit process using the chemical bath. The check tool comprises divisions in liter unit displaying the capacity of a solution.
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申请公布号 |
KR20000020993(A) |
申请公布日期 |
2000.04.15 |
申请号 |
KR19980039881 |
申请日期 |
1998.09.25 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
AHN, DOO YEONG |
分类号 |
H01L21/302;(IPC1-7):H01L21/302 |
主分类号 |
H01L21/302 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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