发明名称 CHEMICAL BATH FOR FABRICATING SEMICONDUCTOR DEVICE
摘要 PURPOSE: A chemical bath for fabricating a semiconductor device is provided to check the capacity of a chemical in the chemical bath. CONSTITUTION: A chemical bath(20) comprises a check part(22) displayed in liter unit on an inner side or on an outer side of the chemical bath in order to check the capacity of a chemical, or a check part of liter unit capable of displaying equally per unit volume. The chemical can mix accurately without an additional tool when using a mixed chemical in a unit process using the chemical bath. The check tool comprises divisions in liter unit displaying the capacity of a solution.
申请公布号 KR20000020993(A) 申请公布日期 2000.04.15
申请号 KR19980039881 申请日期 1998.09.25
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 AHN, DOO YEONG
分类号 H01L21/302;(IPC1-7):H01L21/302 主分类号 H01L21/302
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