| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a small type ultraviolet type laser device, with which ultraviolet rays, having both sufficient output as the light source of an exposing device, etc., and low coherence, can be stably generated and a maintenance operation can be performed, and to provide an exposure system. SOLUTION: A laser beam generating part has a single wavelength oscillation laser 21, a light modulator 22 and a time-division light branching means 23, and a light-modulated pulse beam is branch-outputted to each channel of each single pulse. A light amplifier has fiber light amplifiers 24 and 25, each branched channel laser beam is amplified and outputted. The output terminal 29 of the light amplifier is formed by bundles of desired number and shape of one end of fiber. This wavelength of the bundle output is changed by a wavelength changing part and the ultraviolet ray laser of required wavelength is obtained. By the above-mentioned constitution, the diameter of the output terminal becomes 2 mm or smaller when the fiber bundle is formed in one bundle, and the wavelength changing part is composed of a pair of non-linear optical crystals.</p> |
