METHOD OF DEGASSING ARTICLES

摘要

testing technique; testing articles for degassing in industries where ultra purity of articles is required. SUBSTANCE: article is placed in vacuum chamber which is then evacuated at maintaining degassing temperature on article; article is kept in vacuum chamber during preset period of time, after which evacuation is discontinued and pressure in vacuum chamber is raised to atmospheric level; before evacuation of chamber, article is heated to temperature not exceeding degassing temperature maintained in the course of evacuation; after evacuation, walls of chamber are cooled down and degassing temperature is maintained on article within period of time required for attaining quasi-stationary mode; after evacuation has been discontinued, temperature differential between article and wall of chamber is maintained at level of temperature differential between article and wall of chamber at moment of evacuation of chamber in raising the pressure in vacuum chamber to atmospheric level. EFFECT: considerable reduction of contamination of chamber; reduced degassing time.