METHOD FOR JUDGING COMPOUND OF SAMPLE BY CORPUSCULAR BEAM DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a compd. judging method by a corpuscular beam device capable of automatically judging an unknown compd. of a sample and capable of using the judged compd. as judge data in judgment on and after when the unknown compd. is judged as an unregistered compd. SOLUTION: The compd. judging method of a sample is constituted of a step for obtaining the chemical compsn. of an unknown compd. by the quantitative analysis of the sample using a corpuscular beam device such as EPMA (electronic probe microanalyser), a step for judging the unknown compd. of the sample on the basis of the chemical compsn. obtained by this step and the retrieval data stored in a compd. data base, and a step registering the unknown compd. of the sample impossible to judge in the judging step in the compd. data base as a new compd.