| 摘要 |
PURPOSE:To prevent dust from sticking to an optical system, etc., and to prolong the life of the optical system by providing an opening, by which an outgoing window of a laser beam of a laser generator is hermetically sealed, and also providing a storage chamber with an evacuting means attached for evacuating inside gas. CONSTITUTION:A storage chamber 13 is evacuated by a vacuum pump 16, and a laser beam 2 is emitted. The inside of the storage chamber 13 becomes a vacuum and clean atmosphere. A laser beam 2 from a generator 1 is passed through an outgoing window 11 and emitted to the storage chamber 13, transmitting to a mask 12d through a shaping optical system 12a, 12b and catoptric system 12c. The laser beam 2 that passed through a mask 12d marked with a pattern is made incident on an image-forming optical system 12e and, after image-forming with a prescribed magnification, projected on an object 3 to be machined, performing machining in a prescribed pattern. Since an evaporated substance produced from the object 3 by the irradiation of the laser beam 2 is discharged by a vacuum pump 16, the inside of the storage chamber 13 is kept in a clean atmosphere, and a stable machining is performed with a means 12 stain-free for transmitting a laser beam. |
