METHOD AND DEVICE FOR DIAGNOSING ABNORMAL STATE IN EQUIPMENT AND PRODUCT PROCESS

摘要

PROBLEM TO BE SOLVED: To provide a method and a device capable of improving the identification accuracy of an abnormal state and providing optimum action guidance to be adopted in order to get rid of the abnormal state in a method of diagnosing the abnormal state of object equipment and product processes online or offline. SOLUTION: When a measured abnormal state exceeds a prescribed threshold set up to a level at which the problem of abnormality in equipment or quality is not generated (S2), a state explanation variable and an abnormal objective variable concerning abnormality are found out (S3), one or more factors are analyzed by evaluating the influence relation between an output value and an objective variable by a value F or t used for statistical analysis using a neural network and the influence of an explanation variable on the state objective variable is identified in a form that an unnecessary explanation variable based on the value F or t is abandoned.