Doped aluminum nitride crystals and methods of making them

摘要

Fabrication of doped AlN crystals and/or AlGaN epitaxial layers with high conductivity and mobility is accomplished by, for example, forming mixed crystals including a plurality of impurity species and electrically activating at least a portion of the crystal.

主权项

1. An extraction-activated bi-doped p-type AlN crystal doped with a plurality of VAlSi2N3 complexes.