发明名称 ORGANIC ELECTROLUMINESCENCE ELEMENT AND MANUFACTURING METHOD THEREFOR
摘要 The invention is directed to an organic EL device with a flattened first electrode, and a method of fabricating the same. After an ITO film 11 serving as the first electrode is formed on a glass substrate 10, a combined flattening and leveling film 12 is formed and patterned to form a combined flattening and leveling film 12a. In addition, the ITO film 11 is over-etched to form an ITO film 11a together with an undercut portion 15. After a flattening film 14 or an insulating film is coated all over the surface, a large portion of the flattening film 14 and the flattening and leveling film 12a are removed to allow an insulating film 14a formed in the undercut portion 15 to remain at the same thickness as the ITO film 11a. <IMAGE>
申请公布号 EP0989783(A4) 申请公布日期 2000.12.20
申请号 EP19980912753 申请日期 1998.04.10
申请人 TDK CORPORATION 发明人 KODAMA, MITSUFUMI
分类号 H01L27/32;H01L51/50;H01L51/52;H05B33/10;H05B33/12;H05B33/22;H05B33/26 主分类号 H01L27/32
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