发明名称 ENERGY-DISPERSION-TYPE ELEMENT-ANALYZING DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To obtain an energy-dispersion-type semiconductor X-ray detector capable of extending the life of a compact gas-circulation-type cooler. SOLUTION: The device is provided with an energy-dispersion-type semiconductor X-ray detector D, a gas-circulation-type cooler for cooling the energy- dispersion-type semiconductor X-ray detector D, a controller 7 for controlling a compressor 1 of the gas-circulation-type cooler and the energy-dispersion-type semiconductor X-ray detector D, and a timer unit 8 that is located between the controller 7 and the compressor 1 and controls the compressor 1 in terms of time.</p>
申请公布号 JP2001013252(A) 申请公布日期 2001.01.19
申请号 JP19990184826 申请日期 1999.06.30
申请人 HORIBA LTD 发明人 ARAI SHIGETOSHI;NAGAO TOSHIHARU
分类号 H01L31/09;G01N23/223;G01N23/225;G01T1/24;(IPC1-7):G01T1/24 主分类号 H01L31/09
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