| 摘要 |
PROBLEM TO BE SOLVED: To provide a position detection device with which it is possible to realize a wide measurement range and secure the continuity of measured data.SOLUTION: A position detection device 1 comprises: a nozzle 10 capable of ejecting a pressure gas toward a measurement object W; a partition wall 30 for partitioning between a first chamber 11 and a second chamber 12; a first pressure sensor 41 for measuring the pressure in the first chamber 11; a second pressure sensor 42 for measuring the pressure in the second chamber 12; and a position detection unit 50 for detecting that the measurement object W has approached a prescribed distance or less from the nozzle 10 on the basis of a difference between the output values of the first pressure sensor 41 and second pressure sensor 42. An orifice 32 for making the first chamber 11 and the second chamber 12 communicate is formed in the partition wall 30. The orifice 32 includes a diameter reduction part 32A in which the diameter is gradually reduced from the second chamber 12 toward the first chamber 11 and a constant diameter part 32B, connected to the diameter reduction part 32A, in which the diameter does not change.SELECTED DRAWING: Figure 1 |
