METHOD AND DEVICE FOR DOPING MELT

摘要

PROBLEM TO BE SOLVED: To provide a method for doping in which a vessel can be reused and by which doping is carried out with reduced cost and scattering of a melt is prevented at the time of doping when an easily volatile dopant such as antimony or arsenic is added into molten silicon in a Czocralski method. SOLUTION: A melt 3 is charged into a crucible 4 and a dopant 8 is charged into a vessel 1. Then, the vessel 1 is dipped into the melt 3 and thereby the dopant 8 enters the melt 3 through an opening part 5 formed in the vessel 1. In the case, the vessel has the opening part 5 which is closed by a closing member 6 which is made of the same material as that of the melt 3 and melts when it is brought into contact with the melt 3.