A method for manufacturing an array of m x n thin film actuated mirros for use in an optical projection system

摘要

An inventive method for manufacturing an array of thin film actuated mirrors for use in an optical projection system includes the steps of: (1) providing an active matrix; (2) depositing a thin film sacrificial layer; (3) ion-implanting the thin film sacrificial layer; (4) creating an array of empty cavities; (5) depositing an elastic layer; (6) forming an array of conduits; (7) depositing a second thin film, a thin film electrodisplacive and a first thin film layers, successively, thereby forming a multiple layered structure; (8) patterning the multiple layered structure into an array of semifinished actuated mirrors; (9) forming a thin film protection layer covering each of the semifinished actuated mirrors; (10) removing the thin film sacrificial layer by using an etchant; (11) rinsing away the etchant by using a rinse; (12) removing the rinse; and (13) removing the thin film protection layer, thereby forming the array of thin film actuated mirrors.