| 摘要 |
PROBLEM TO BE SOLVED: To provide an ink jet recording head, its manufacturing method and an ink jet recorder, in which ink ejection characteristics and stability are enhanced by enhancing relative positional accuracy between a piezoelectric element and a pressure generating chamber and the pressure generating chambers can be arranged at high density while reducing crosstalk. SOLUTION: The ink jet recording head comprises a channel forming substrate 10 in which pressure generating chambers 11 communicating with nozzle openings are formed, and piezoelectric elements 300 formed in regions corresponding to the pressure generating chambers 11 through a diaphragm constituting a part of the pressure generating chambers 11 by thin film and lithography methods wherein a space part 41 communicating with the pressure generating chamber 11 and having at least one side defined by the diaphragm is provided in a region facing the pressure generating chamber 11 between the channel forming substrate 10 and the diaphragm and the width of the pressure generating chamber 11 is set not wider than the width of the space part 41 at least on the side of the space part 41 thus enhancing relative positional accuracy between the pressure generating chamber 11 and the piezoelectric element 300. |
