发明名称 MICROSCOPIC ANALYSIS DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To damp the vibration by converting vibration energy into heat energy when a constituent member of a microscopic analysis device such as an electron microscope is vibrated in a natural vibration mode by the input of ambient vibration, sound. SOLUTION: Vibration suppressing devices Ux; Uz are equipped with a holder fitting member 20; fitting member supporting devices 11-19 having moving members 17, 18 movable together with the holder fitting member 20 and a supporting member 11; vibration suppressing member fitting parts 52; 61 vibrating when the fitting member supporting device vibrates; inertia members 51; 62 relatively movably supported to the vibration suppressing member fitting parts; and vibration energy absorbing members 53; 63 for suppressing vibration which is repetition of relative reciprocating movement of the vibration suppressing member fitting parts and the inertia members by being installed between the vibration suppressing member fitting parts and the inertia members, and converting the vibration energy into the heat energy when the vibration is generated.</p>
申请公布号 JP2002124206(A) 申请公布日期 2002.04.26
申请号 JP20000312488 申请日期 2000.10.12
申请人 JEOL LTD 发明人 HAMOCHI MITSURU
分类号 G01N23/225;G02B21/24;H01J37/20;(IPC1-7):H01J37/20 主分类号 G01N23/225
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