Optical beam splitter that can be manufactured by micromechanical means

摘要

The described beam splitter (39) has a support frame (40) made of silicon that has a membrane (42) inside made of silicon. The membrane (42) has in particular openings (43) with bridges (43') formed between them. On the side of membrane (42) facing the incident beam (47) is an aluminum coating to increase the reflectability or degree of reflection of the membrane (42). An incident beam bundle (47) contacts the beam splitter (39) at angle of incidence phi. A portion (48) of the incident beam (47) is reflected off the bridges (43'), and the remaining portion (49) of the beam (47) freely passes through the openings (43). The beam is correspondingly divided into a reflective portion (48) and transmitted portion (49).