| 摘要 |
PROBLEM TO BE SOLVED: To provide an angular velocity sensor with increased detection accuracy and sensitivity by flattening tuning-fork grooves in two fork-shaped quartz pieces bonded together to prevent a tuning-fork vibration from being coupled to a vertical vibration, and to provide a manufacturing method thereof. SOLUTION: In the case of an angular velocity sensor element comprising the two fork-shaped quartz pieces bonded together with their ±X axes reversely directed to each other, the tuning fork type angular velocity sensor element according to this manufacturing method is made by bonding together two quartz wafers having crystal axes X, Y, and Z with their Y- and Z-axis directions agreeing with each other and their ±X axes reverse directed to each other, and by working the front and rear quartz wafers by etching into the fork-shaped quartz pieces each comprising a tuning fork base part 2 and a pair of tuning fork arm parts 3 with their width, length, and thickness being in the X-, Y-, and Z-directions, respectively. In the bonding, the +X axis of the front quartz wafer is directed leftward in a direction normal to the extending direction of the arm parts from the base part. |
